Trade.Information

Product Name: Optical/e-Beam

Product Description

KLA-Tencor’s defect review systems capture high resolution images which enable defect classification. The tools may be operated manually or automatically, using the defect location files created by automated inspection systems. Our complete line of defect review systems spans optical and electron-beam technologies, from bench-top research systems to production-worthy tools having full factory automation. Integrated automatic defect classification (ADC) is available on some systems.

eDRTM-5xxx: SEM-based defect review and classification system
INS-3xxx: Factory-automated, full-spectrum optical review and classification systems
INM-Series: Universal defect review microscopes
IRIS: Infrared Inspection and Review Station

Related Products
eDR-5200
INM100
INM100 IR
INM200 UV
INM300 DUV
INS3000 DUV
INS3300
IRIS2000

Company Details

Corporate History

KLA-Tencor was formed in May 1997 through the merger of KLA Instruments and Tencor Instruments, two long-time leaders in the semiconductor equipment industry, each with over 20 years of experience. With combined... more