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Details of Dr. Toh-Ming Lu

Ray Palmer Baker Distinguished Professor of Physics
Department of Physics, Applied Physics, and Astronomy
Rensselaer Polytechnic Institute
Troy, NY 12180-3590
Tel: 518/276-2979
Fax: 518/276-6680
Email: lut@rpi.edu

Education

BS
 National Cheng Kung University, Taiwan (Physics, 1968)
 
MS
 Worcester Polytechnic Institute (Physics, 1971)
 
PhD
 University of Wisconsin, Madison (Physics, 1976)

Professional Career

1999-2005
 Director, SRC Center for Advanced Interconnect Science and Technology (13 universities)
 
1997-
 Associate Director, Center for Integrated Electronics and Electronics Manufacturing (CIEEM), Rensselaer
 
1996-1999
 Associate Director, SRC Center for Advanced Interconnect Science and Technology, a national center including 8 universities
 
1992-1997
 Chairman, Department of Physics, Applied Physics, and Astronomy, Rensselaer Polytechnic Institute
 
1982-present
 Faculty, Department of Physics, Assistant Professor: '82-'86, Associate Professor: '86-'89, Full Professor: '89-), Rensselaer Polytechnic Institute
 
1979-1982
 Research Associate, Materials Science, University of Wisconsin, Madison
 
1979-1980
 Guest Scientist, National Bureau of Standards, Washington, DC
 
1977-1978
 Physics and Math Teacher, Catholic High School, Sibu Malaysia

Research Fields and Funding

Thin film morphological evolution and ordering; 3D integrated nano-structure formation; diffraction from imperfect surfaces, overlayers, dynamic growth fronts; growth and characterization of metal, ceramic, and polymeric thin films for microelectronics, photonics, and nanoelectronics applications. Since '82, well funded research by NSF, DARPA, ARO, AFOSR, IBM, DEC, Kodak, Martin-Marietta, GE, Intel, Sheldahl, and AT&T.

Awards and Honors
          Semiconductor Research Corporation (SRC) Faculty Leadership Award (2005)

            Materials Research Society Medal Award (2004)

            Williams Wiley Distinguished Faculty Award (2002)

Fellow of American Vacuum Society (1995).

Fellow of the American Physical Society (1994).

Rensselaer Center for Integrated Electronics Faculty Award (1993).

Semiconductor Research Corporation (SRC) Invention Award (1988).

Rensselaer Early Career Award (1986).

Publications and Invited Talks

Author and co-authored five books, edited two books, and four book chapters

Over 400 technical papers; six patents

Over 200 invited lectures at national, international conferences, and academic and industrial institutions, including APS, MRS, AIME, Gordon, ACS.

Selective Professional Activities

Member of American Physical Society, American Vacuum Society, and Materials Research Society. Committee member for "International Workshop on Ionized Cluster Beam Technology", Tokyo ('86). Panelist and Section Chair, "International Workshop on Self-Ion Assisted Deposition", Colorado Spring ('91). Section Chair, AVS ('85), MRS ('91, '94). Local Committee member and Section Chair, PEC ('93). Panelist/Specialist for World Bank to evaluate performance of the World Bank loan to China ('88). DOE Panel Review Member, Materials Division ('93). United Nation Visiting Scholar (Microelectronics) to China (1994). Co-organizer of '95 and '98 MRS Symposiums on Low Dielectric Constant Thin Films; co-organizer of '04 MRS Symposium on Interconnect. Panelist/Steering Committee/Session Chair at the 1996 Low Dielectric Constant Materials Workshop sponsored by SEMATECH and Steering Committee/Session Chair of the same Workshop in 1999. NSF SBIR Review Panelist (1997). External Assessor for Hong Kong Research Grants Council (1993-). Editorial Board member of Chemistry and Physics of Materials, 1995-. SRC University Advisory Board, 1998-. International Interconnect Technology Conference organizing committee, 2000-. Organizer of the SRC Workshop on "Fundamental limits on metallization". Co-organizer of the Symposium on Si Microelectronics in the 2005 International Conference on Materials for Advanced Technologies (ICMAT)

PhD Student Graduated

21 out of the 31 former PhD students won best thesis/paper awards. Former students hired by major semiconductor related companies such as IBM, Intel, AMD, Motolora, MA/COM, Analog, Eaton, and GE, and Government laboratories. Educated numerous undergraduate students in our Undergraduate Research Participation Program over the two decades.

Departmental Development

Research development: hired as the first Assistant Professor in the Department (1982) to conduct interdisciplinary research and teaching. His success had encouraged subsequent hiring of more faculty working in the interdisciplinary area. After a decade of development, the applied physics program has been ranked No. 9 in the nation since 1993 by the Gourman Graduate Report.

Teaching development: (As Chair of the Department (1992-1997))

1.      established an undergraduate Applied Physics degree program

2.      created Resnick Center for Undergraduate Education;

3.      created Hill B. Huntington computing facility for graduate research;

4.      eliminated the traditional large lecture format and implemented Studio Physics scheme for Introductory Physics courses (integration of lecture, recitation, and laboratory in one classroom). The Department became the first in a research oriented university to totally eliminated the traditional large lecture format and adopted the smaller classes, multimedia environment to deliver Introductory Physics courses. The development is instrumental for Rensselaer to win the 1995 Theodore M. Hesburgh Award for Innovation in Undergraduate Education, 1995 Boeing Outstanding Educator Award , and 1996 Pew Award for Leadership and Renewal Undergraduate Education.

Center Activities
Lu was the Director (1999-2005) of the SRC sponsored Center for Advanced Interconnect Science and Technology (CAIST). CAIST involves 13 Universities, 25 faculty, and more than 40 graduate students engaged in a nation-wide interdisciplinary research in ultra-fast computer chip. Lu was also one of the earlier members of the Center for Integrated Electronics( (CIE) founded in 1982 at Rensselar. Assumed the position as the Associate Director for CIE in 1997. Involved in the strategic planning/execution of CIEEM's (a ~$9M operation at the present time) direction/business.